Applying Extremely Thin Layers in a Vacuum Chamber: Hexapods Proven and Tested in Particle Accelerators

Hexapods of Physik Instruments (PI) allow individual positioning in all
six axes. Their parallel-kinematic structure is considerably more
compact and stiffer than that of serially stacked multi-axis systems.
Moreover, there is no accumulation of guiding errors and tilt errors of the
individual axes. The pivot point can be selected as desired via software
commands and remains independent of the motion.
This is why Hexapods are often the method of choice for high-precision
positioning tasks. With their different designs, they cover a wide range
of applications and, when designed accordingly, their use in high vacuum
does not present a problem either.


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