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Leveraging Ceramic Additive Manufacturing for Automated Semiconductor Handling
Drawing on its heritage as a Bosch company and over a century of expertise in ceramics, Bosch Advanced Ceramics/DE produces high-performance parts for many industries using additive manufacturing. The company offers expert consultation to assist clients with material selection, design optimization, and functionalization possibilities. By combining the unique properties of advanced ceramics with the benefits of additive manufacturing, Bosch Advanced Ceramics opens new paths for creating superior components for various industries.
The Large Ring Blade: Redefining the Handling Process with Additive Manufacturing
One of Bosch Advanced Ceramics’ standout applications is a large ring blade commonly used in the semiconductor production process. It is specially engineered for automated actuator handling and processing 200 mm wafers from cassettes or process chambers. Made from >99.8 % alumina, this lightweight component measures 250 x 200 x 3.5 mm and weighs just 280 grams. A continuous 120 mm inner channel is integrated into the part, allowing the flow of gases or liquids, which could be used to guide compressed air, cool parts or create suction to hold parts in place.
Using additive manufacturing enables Bosch Advanced Ceramics to manufacture the large ring blade in a single piece and achieving over 99 % of alumina’s theoretical density (Al2O3), ensuring both reliability and longevity. The part has strict flatness requirements (under 100 µm); Bosch Advanced Ceramics meets that criterion with excellent tolerances and no deformities. This precision is achieved not only through advanced additive manufacturing technologies, which eliminate the need for assembly – reducing the challenges with airtightness and potential leakage – but also through the entire process chain. This includes precise sintering, proper cleaning and rigorous quality assurance – embodying what the company proudly refers to as “Bosch quality”.
Using photopolymerisation Bosch Advanced Ceramics enables designers to create complex geometries and features that traditional methods cannot achieve. This tool-free approach allows for high customization without added costs. Tight tolerances can be achieved with the large ring plate, allowing it to fit into any production environment seamlessly without the need for post-production machining, minimising costs. Additionally, each plate can be customized with specific markings to meet individual client needs.
Advanced Ceramics: The Unsung Hero of Semiconductor Applications
Bosch Advanced Ceramics harnesses the exceptional properties of alumina for the large ring plate. Unlike metals, ceramics do not contaminate wafers or compromise purity in semiconductor manufacturing. With a high purity level of >99.8 %, alumina significantly reduces contamination risks. Its non-reactive nature, combined with excellent chemical and temperature resistance, makes it an ideal choice for the meticulous semiconductor environment, ensuring consistent and reliable performance.
The large ring blade can also be used across various industries beyond semiconductors, in electronics, industrial, and energy sectors for handling electronic parts, integrating innovative functionality, and supporting high-performance applications in furnace and kiln technology.
Bosch Advanced Ceramics: A Legacy of Excellence
Continuously striving to push the boundaries of what’s possible with technical ceramics and 3D printing, the large ring blade exemplifies Bosch Advanced Ceramics’s dedication to innovation and excellence. Experience the future of semiconductor handling with Bosch Advanced Ceramics. Connect with our team today to discover how we can help transform your applications with our advanced ceramic solutions:
www.bosch-advanced-ceramics.com